|
Currently CTO and Deputy General Manager of Piotech, Inc, in charge of advanced tool and process development. Prior on-boarding Piotech, worked as process development manager at US equipment vendor responsible for PECVD application and integration for top memory and logic fabs, including YMTC, Intel, TSMC, Kioxia etc. PHD in Material Science and Engineering from University of Maryland, College Park. Master and Bachelor from Nanjing University. Expertise in CVD/ALD thin film deposition equipment R&D, micro-processing. Strong academic and technical records: 26 journal research papers with 5000+ citations, 30+ presentations in international conferences, and 50+ patents.
|
