Symposium Chair: Prof. Cheng Zhuo, Zhejiang University, China
| ** | to designate keynote talk - 30 min | |||
| * | to designate invite talk - 25 min | |||
| to designate regular talk - 15 min |
Sunday, March 22, 2026, Kerry Hotel Pudong, Shanghai
Meeting Room: Function Room 4
Session I: AI-Driven Manufacturing Innovation
Session Chair: Zheyu Yan
| **13:30-14:00 | AI+ Manufacturing Application of AI in Semiconductor Process and Equipment |
| Chiayen Li, Nexchip Semiconductor | |
| *14:00-14:25 | The Silicon Backbone of Intelligence: How Semiconductors Are Powering the Next Era of AI |
| Diana Khlan, Chips Weekly by Diana | |
| *14:25-14:50 | Large Model-Driven Co-Optimization of IC Design and Manufacturing |
| Qi Sun, Zhejiang University | |
| 14:50-15:05 | Break Time |
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| *15:05-15:30 | Unlocking the Power of Semiconductor Data: Driving Innovation through Advanced Analytics |
| Guohao Wang, ZetaTech | |
| 15:30-15:45 | Semiconductor Manufacturing Innovation for Energy-Efficient AI Data Center |
| Pengfei Lyu, Lam Research | |
| 15:45-16:00 | Physical-Data Hybrid Modeling in Advanced Semiconductor Manufacturing |
| Shuai Wang, Advanced Micro-Fabrication Equipment Inc. | |
| 16:00-16:15 | Real-Time Virtual Metrology Modeling for Etch Rate Prediction |
| Guangyao Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 16:15-16:30 | Coffee Break |
| 16:30-18:00 | Panel Discussion(Meeting Room: Pudong Ballroom 1) |
Monday, March 23, 2026 Kerry Hotel Pudong,Shanghai
Meeting Room: Function Room 4
Session II: AI-Enabled EDA and DFM
Session Chair: Ye Lu
| **09:00-09:30 | Pushing the Limits of Graph Learning for Scalable and Accurate Circuit Design |
| Tsung-Yi Ho, The Chinese University of Hong Kong, CUHK | |
| *09:30-09:55 | System Technology Co-Optimization (STCO) of 2.5D/3D IC Interconnects for Unleashing AI Potential |
| Bo Pu, DeTooLIC Technology co., Ltd. | |
| *09:55-10:20 | EDA in the Era of AI: What Large Models Bring to Chip Design? |
| Qiang Xu, The Chinese University of Hong Kong, CUHK | |
| 10:20-10:35 | Trifocusnet: A Triple-Branch Focus-Attention Network for Hotspot Detection in LELE Double Patterning Process |
| Wenxi Zhuang, Fujian Jinhua Integrated Circuit Co.,Ltd | |
| 10:35-10:50 | Coffee Break |
Session III: AI for TCAD and Device Optimization
Session Chair: Peng Huang
| *10:50-11:15 | Memristor-based Computing-in-Memory Chip Co-Design for Edge AI |
| Xingsheng Wang, Huazhong University of Science and Technology | |
| *11:15-11:40 | A Model-driven DTCO with Machine Learning Enhancements |
| Lining Zhang, Peking University | |
| 11:40-11:55 | DiffusionTCAD: Joint Multi-Physics Field Synthesis for Real-Time Surrogate Device Simulation |
| Xulin Zhang, Zhejiang University | |
| 11:55-12:10 | Bayesian Learning for Structure and Recipe Optimization with Limited Data and Mixed Variables |
| Jiaxin Zhu, Advanced Micro-Fabrication Equipment Inc. | |
| 12:10-12:25 | Emulation of Intensity-Dependent Neuronal Firing Latency Using a HfOx-Based Volatile Memristor |
| Xiaqing Fu, Zhejiang University | |
| 12:25-13:30 | Lunch Break |
Session IV: Advanced Circuit Design and Technology Co-Optimization
Session Chair: Xingsheng Wang
| *13:30-13:55 | AI-Assisted Radio-Frequency Integrated Circuits |
| Chenhao Chu, ETH Zürich | |
| *13:55-14:20 | Re-thinking LLM Systems Beyond DRAM: Near-Storage Computing for Inference and Retrieval |
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Weihong Xu, Zhejiang University |
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| *14:20-14:45 | AI-enabled Layout-Mask-Wafer Co-Optimization |
| Hao Geng, ShanghaiTech University | |
| 14:45-15:00 | Design Analysis and Wafer Process Optimization of Flicker-Noise for 0.152µM PMIC Chips |
| Wen-Sheng Xu, UNISOC (Shanghai) Technologies Co., Ltd. | |
| 15:00-15:15 | Module-based Single-frequency FBAW Filter Design for mmWave Band (24.25–27.5 GHz) |
| Xian Ji, IWA SYSTEMS INC | |
| 15:15-15:30 | Break Time |
Session V: Devices, Test, and Manufacturing Applications
Session Chair: Weihong Xu
| 15:30-15:45 | Machine Learning Driven Full Spectrum Analysis for Process Enhancement |
| Yuyang Sun, Lam Research | |
| 15:45-16:00 | Machine Learning for Process Uniformity Optimization |
| Wenting Wu, Lam Research | |
| 16:00-16:15 | Data-Driven Root Cause Analysis for Semiconductor Device Unrepeatable Issue |
| Jingqi Wang, Advanced Micro-Fabrication Equipment Inc. | |
| 16:15-16:30 | Data-Driven Assessment of Health Status for Semiconductor Equipment |
| Huijie Mao, Advanced Micro-Fabrication Equipment Inc. | |
| 16:30-16:45 | Reliable and Cost-effective Solutions for Specialty Technologies in Automotive |
| Jiayu Sun, Lam Research | |
| 16:45-17:00 | Maximizing Scan Test Throughput- Integrating Tessent SSN with the Advantest V93000 Across the Silicon Lifecycle |
| Kevin YAN, ADVANTEST | |
| 17:00-17:15 | Temperature Control of Esc Under Cold Wafer Chucking Disturbance Using Modern Two Degrees-of-Freedom Controller Design |
| Jiaxuan Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 17:15-18:00 | Coffee Break |
| 16:00-18:00 | Poster Session: Monday, March 23 (3F, Kerry Hotel Pudong, Shanghai) |
| 10-7 | Maximize Equipment Capacity By EI Products And Digital Twins |
| Jeremy Wu, Lam Research | |
| 10-14 | Explainable Machine Learning for CFP-LDMOS: Mechanism Analysis and Electrical Performance Prediction via XGBoost and SHAP |
| Yiting Ye, Zhejiang University | |
| 10-15 | Parameter Optimization for Plasma Etching Profiles Using Machine Learning and Bayesian Optimization |
| Ziyao Luo, Shanghai University | |
| 10-19 | An ICP Process Prediction Method Based on the Ae-Transformer Neural Network |
| Tingyang Qin, Nanjing University | |
| 10-20 | Toward Accelerated Device Development: A DNN-CNN Approach for DEMOS Breakdown Voltage Prediction |
| Yan Pan, Zhejiang University | |
| 10-22 | A Transformer-Driven Wafer Map Classification Approach for Generalizable Wafer Quality Control |
| Gangjiang Li, Semi-Tech Co., Ltd., | |
| 10-23 | Predictions and Optimizations for Thin-Film Property in CESL Process by CGAN |
| Weijianxiong Ren, Zhejiang University | |
| 10-24 | A Deep Learning-Based Surrogate Model for LOCOS Etch Process TCAD Simulation using a Conditional Variational Autoencoder |
| Qipei Zhang, Zhejiang University | |
| 10-25 | Intelligent Semiconductor Manufacturing: Process Optimization and Quality Enhancement Based on Data and Algorithms |
| Xiaolan Duan, Shanghai Huali Integrated Circuit Corporation | |
| 10-26 | Mixture-of-Experts Collaboration for Intelligent OQA Management Ecosystem |
| Jinjin Li, Shanghai Huali Integrated Circuit Corporation | |
| 10-27 | Wat Data Generation with Classifier-Free Guided Diffusion Model for Semiconductor Process Prediction |
| Liangyao Deng, Zhejiang University | |
| 10-28 | Research on a Data-Augmentation-Based Neural-Network Model Methodology for Electrical-Parameter Prediction of 40nm MOSFETs |
| Fan Yang, Nanjing University | |
| 10-30 | Inline Anomaly Detection System Based on Historical Data Trends |
| Shijia Yan, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.(XMC) | |
| 10-31 | A Cost-Efficient Reinforcement Learning Framework for Semiconductor Process Recipe Optimization |
| Lin Fu, Zhejiang University | |
| 10-33 | A Multi-Scale Simulation Tool for Semiconductor Fabrication Modeling |
| Sisi Liu, Advanced Micro-Fabrication Equipment Inc. | |
| 10-35 | Stacking Ensemble Learning For Predicting Thickness and Refractive Index of SiCOH Film |
| Jinxu Liu, Zhejiang University | |
| 10-37 | A Learning-Based Method for High-Performance Tracking Control in Semiconductor Manufacturing |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-38 | Performance Assessment-Based Adaptive Optimization Of PID Control in Semiconductor Manufacturing |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-39 | Performance Assessment-Based Adaptive Optimization Of PID Control in Semiconductor Manufacturing |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-40 | Smith Predictor-Based Adaptive Sliding Mode Control Scheme for Semiconductor Temperature Regulation |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-41 | Depth-Aware Vision Transformer for High Aspect Ratio SEM Image Segmentation and CD Metrology |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-42 | Reinforcement Learning-Based Wafer Predictive Pickup Scheduling Optimization |
| Shangwei Zhao, Advanced Micro-Fabrication Equipment Inc. | |
| 10-46 | Feature Extraction Methods in Semiconductor Manufacturing Systems |
| Zhihui Ji, Advanced Micro-Fabrication Equipment Inc. | |
| 10-49 | Adaptive Semiconductor Process Optimization Based On Batch Bayesian Optimization |
| Kai Zhang, Advanced Micro-Fabrication Equipment Inc. | |
| 10-50 | CMOS Image Sensor Fixed Pattern Noise Performance Optimization and Mechanism Analysis |
| Jiajie Kang, Shanghai Huali Integrated Circuit Corporation |