Yuan Lu 陆原
Technical Marketing Manager, Evatec China Ltd.
意发薄膜科技(上海)有限公司,技术市场经理

个人简介 / Biography

Dr. Yuan Lu is Technical Marketing Manager at Evatec China. He is responsible for the Semiconductor market segment in terms of market strategy and technical development. Dr. Lu was studying piezoelectric material in Germany for next generation RF filter devices at Fraunhofer IAF institute, with a joint development program together with Evatec and obtaining rich experience on magnetron sputtering and material physics. As technical marketing manager at Evatec, he joined several projects together with customer on mass production optimization and technical roadmap decision. These expertise helps Evatec offering best technical know-how and mass-production experience.


摘要 / Abstract

The device made by 3rd Generation semiconductor material benefits from high voltage, high working temperature, high power, radiation resistance, high conductivity, high speed and low loss. The 3rd generation semiconductor material includes Gallium Nitride (GaN), Silicon Carbide (SiC), Zinc Oxide (ZnO) and diamond, which is categorized as Wide Band Gap (WBG) semiconductors. Evatec as a renowned Swiss semiconductor thin film equipment manufacture with long history, is company holding strong competence on WBG semiconductor know-how and mass production experience cooperating with industry. At SemiCon 2021, we are proud to introduce the semiconductor thin film solution focusing on SiC-based devices, especially for power device and wireless devices. We wish our technology could help to develop our semiconductor industry and shape the future.