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Albert Qiu 邱晓伟 Engineering Head, Applied Materials, Inc Automation Products 工程主管, 应用材料公司, 自动化产品部 |
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个人简介 / Biography Albert Qiu has been working on building Smart Factory CIM solutions in the complex manufacturing environment for more than 10 years. He has rich experience to help customers to improve the process stability and reduce system failure or excursion using APC(Advanced Process Control) technologies. 摘要 / Abstract The main limitations of a run-to-run (R2R) controller are a low metrology sampling rate, recipe adjustment delay, and expensive design of experiments (DoE). To address these limitations and draw closer to a Zero Defects Manufacturing (ZDM) paradigm, this study proposes three different predictive algorithms including multiphysics model, partial least squares (PLS), and neural networks with three different use cases. Results of our approach showed better yield, electrical performance, and process capability. |
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