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Xinliang Lu is a Distinguished Member of Technical Staff at Plasma Product Group, Mattson Technology. He is responsible for the surface treatment for semiconductor processing. Xinliang received his B.S. degree in Physics from Shandong University and his Ph. D. degree in Materials Science and Engineering from the University of Illinois at Urbana-Champaign. He has more than 19 years of experiences on Semiconductor processing including, metal and dielectric deposition, surface cleaning, selective etching and surface treatment. He has numerous publications and over 30 patents.
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