|
Albert Chen 陳柏嘉 Advanced Technology Engagement Senior Director, Entegris 应特格先进技术应用资深处长 |
|
讲师简介 / Speaker Bio Albert Chen serves as the Sr. Director for Advanced Technology Engagement under the CTO organization in Entegris. In his capacity, he is responsible for extracting and interpreting semiconductor technology roadmaps and driving alignment of solution development inside Entegris. He also oversees the development of Entegris Taiwan Technology Center and leads a team focusing on material modeling & simulation based on computational chemistry and AI in Entegris. He joined Entegris in 2014 as the RD manager in the Microcontamination Division and migrated to current position in 2015. Prior to that, Chen served as the Technical Manager in TSMC leading or participating in projects to improve defects/microcontaminations in wet etch & clean, photolithography and CMP areas. He was also leading the collaborations with academia and other industrial consortia in developing new inspection and metrology tools to accelerate the introduction of new nodes. He is the founding member of SEMI Taiwan Inspection & Metrology Committee. 摘要 / Abstract Material innovations have become key enablers in semiconductor processes. Microcontamination control during the manufacturing and applications of these novel new materials is playing a critical role in maintaining production yields and long-term stability of semiconductor devices. In this presentation, key material innovations in semiconductor processes will be reviewed briefly followed by an introduction to emerging challenges in microcontamination control. In the last part, several cases are exemplified to demonstrate integrated microcontamination control approaches that are imperative to contain defect levels effectively in semiconductor processes. |
|
