Dr. Kaz Wikiel
Vice President, Technic, Inc

Biography

Dr. Kaz Wikiel has been working more than 25 years at Technic, Inc. on various aspects of electroplating, with a special emphasis on analytical control of plating solutions. As a VP of the RTA Business Unit, he leads a distinctive team of scientists, engineers, and programmers developing and implementing innovative and unique approach to the chemical metrology. Kaz is the co-author of more than 30 papers in peer-reviewed journals, numerous presentations at scientific and technical conferences, and he holds 9 US patents.

Abstract

Electrochemical deposition processes are commonly used in a present-day semiconductor manufacturing. The increasing demand for a reliable and in-depth process control pushes metrology expectations into totally new directions. This presentation is focused on defining and discussing how these challenging expectations can be achieved by new innovative technology and methodology.