Dr. Jiamin Liu

Doctor
Huazhong University of Science and Technology

 


Jiamin Liu is a postdoctoral fellow at the Nanoscale and Optical Metrology (NOM) Research Center led by Prof. Shiyuan Liu, School of Mechanical Science and Engineering, Huazhong University of Science and Technology (HUST), and received his Ph.D. in Mechanical Engineering from HUST in 2020. His main research directions are the EUV lithography modeling, the ellipsometric method for dynamic processes, and computational imaging for patterned wafer inspection. He has published over 30 papers and granted 20 patents involving ellipsometry, computational lithography, and patterned wafer inspection. He also hosts the National Natural Science Foundation of China and won first prize in the China Instrument and Control Society Technological Invention Award.