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Bachelor degree in Physics and Master degree in Semiconductor Physics & Devices, from Jilin University; PhD degree in Chemistry from National University of Singapore;
27 years of experience in semiconductor process R&D, focus in dry etching and metrology;
As inventor of 20+ patents; author of 10+ papers
Winner of “National Invention Award” (国家发明奖，中国科技部), and “Science and Technology Progress Award” (科学技术进步奖，中国教育部)
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