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Steve Zhao 赵洪辰 Application Director of Axcelis Technologies, Inc. |
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讲师简介 / Speaker Bio Dr. Steve Zhao is the Applications Director at Axcelis Technologies, Inc.. He joined Axcelis in 2005 and is responsible for the process and applications. He has extensive experience with the implantation applications for both silicon and the compound semiconductors, including Logic, Memory and Power Devices. Dr. Zhao holds a Ph.D. from the Institute of Microelectronics, IMECAS.摘要 / Abstract Rapid growth in the compound semiconductor market, particularly demand for SiC devices, is creating significant manufacturing capacity challenges around the globe. This demand is fueling innovations in the SiC device supply chain - from the creation of larger substrates through higher productivity device manufacturing equipment. In particular, the unique requirements for doping SiC substrates are driving the industry to adopt a new class of ion implantation systems designed to address key production bottlenecks while also covering a wide operating space. This paper details the doping production bottlenecks that are unique to various device structures, e.g. Planar and Trench MOSFETs and introduces a new class of implanters designed to deliver the highest productivity with the lowest cost of ownership. |
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