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Dr. Dirk Juergens studied Physics and Applied Optics at the University of Stuttgart, Rose-Hulman Institute of Technology, IN, USA, and University of Konstanz and received his doctorate degree in 2004. He joined ZEISS in 2004 as a scientist and worked on several positions in R&D and in systems engineering. At the moment, he is Program Systems Engineer EUV in Carl Zeiss SMT GmbH.
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