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Dr. Robert Socha is an ASML Fellow at ASML Brion. In 1999, he joined ASML and works with customers to help them use ASML lithography equipment more effectively. He began his career at ASML in imaging, and then to metrology for overlay, alignment, and scatterometry. With this knowledge of imaging and metrology along with his background in design, he helps develop hardware and software for the minimization of edge placement error. Dr. Socha is one of the core developers of ASML’s source mask optimization (SMO). Dr. Socha received his B.S. degree in electrical engineering from University of Michigan in 1991 graduating Summa Cum Laude, and his Ph.D. degree in electrical engineering from the University of California at Berkeley in 1997. In 2011, Dr. Socha was elected fellow of SPIE.
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