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Dr. Lifei Zhang is an assistant professor in the department of mechanical engineering at Tsinghua University. She earned her Ph.D. in mechanical engineering from Tsinghua University, China, and served as a visiting scholar at Northeastern University, USA. Her research focuses on tribology in micro/nano manufacturing, integrated circuit manufacturing at advanced technology nodes, and nano/atomic scale precision surface fabrication. She has published over 20 papers in prestigious journals including Materials Futures, Friction, and Applied Surface Science. She holds more than 10 patents as the first inventor and has led 10 national and regional research projects as principal investigator. Her achievements include one provincial/ministerial-level award, three conference paper awards, and the successful translation of three innovations into practical applications. Her work has provided key technological and process support for the development of domestic 12-inch chemical mechanical polishing equipment.
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